Curable composition and cured product thereof, method for producing cured product, method for manufacturing optical component, method for manufacturing circuit board, and method for manufacturing electronic component
                        
                            
                                申请人:CANON KABUSHIKI KAISHA
                            
                            
                                公开号:US10023673B2
                            
                            
                                公开(公告)日:2018-07-17
                            
                            
To provide a curable composition for nanoimprinting that can form a cured product that has a sufficiently cured surface and is less prone to a pattern collapse defect even when the curable composition is cured by a photo-nanoimprint method at a low exposure dose. To provide a nanoimprint method for forming such a cured product. To provide a cured product that is less prone to a pattern collapse defect even when cured at a low exposure dose, a method for producing such a cured product, a method for manufacturing an optical component, a method for manufacturing a circuit board, and a method for manufacturing an electronic component.
A curable composition that satisfies the formula (1) in a cured state:
Er1/Er2≥1.10  (1)
wherein Er1 denotes the surface reduced modulus (GPa) of a cured product of the curable composition, and Er2 denotes the internal reduced modulus (GPa) of the cured product.
                            提供一种用于纳米压印的可固化组合物,即使该可固化组合物以低曝光剂量通过光纳米压印方法固化,也能形成具有充分固化表面且不易出现图案塌陷缺陷的固化产品。提供一种形成这种固化产品的纳米压印方法。提供一种即使在低曝光剂量下固化也不易出现图案塌陷缺陷的固化产品、一种生产这种固化产品的方法、一种制造光学元件的方法、一种制造电路板的方法和一种制造电子元件的方法。
在固化状态下满足式(1)的可固化组合物:
Er1/Er2≥1.10 (1)
其中 Er1 表示固化组合物固化产物的表面还原模量(GPa),Er2 表示固化产物的内部还原模量(GPa)。