(Meth)acrylate compounds having a norbornane, bicyclo[2.2.2]octane, 7-oxanorbornane or cyclohexane ring structure and a &ggr;-butyrolactone ring structure connected together by a suitable linker are novel and useful in forming polymers having high transparency, especially at the exposure wavelength of an excimer laser.
(具有降
冰片烷、双环[2.2.2]
辛烷、7-氧杂降
冰片烷或
环己烷环结构和&ggr;
-丁内酯环结构的(甲基)
丙烯酸酯化合物,通过合适的连接剂连接在一起,是一种新颖且有用的聚合物,可形成具有高透明度的聚合物,尤其是在准分子激光的曝光波长下。