There is disclosed a fluorine-containing polymerizable cyclic olefin compound that has one or more partial structures represented by the following general formula (1) or (2). There can be provided a novel fluorine-containing polymerizable cyclic olefin compound which is excellent in transparency to irradiation, for example, at a wavelength of 200 nm or less, especially at a wavelength of 160 nm or less and dry etching resistance, has low hydrophobicity, and is excellent in development characteristics, and thus is useful as a raw material for a base resin of photoresist composition.
本发明揭示了一种含
氟的可聚合环烯化合物,其具有以下一般式(1)或(2)所代表的一个或多个部分结构。可以提供一种新的含
氟可聚合环烯化合物,其在辐射透明度方面表现出色,例如在200纳米或更低波长处,特别是在160纳米或更低波长处和干法蚀刻抗性方面表现出色,具有低亲
水性,并且在开发特性方面表现出色,因此可用作光刻胶组分的基础
树脂的原材料。