A salt suitable for an acid generator and a chemically amplified resist composition containing the same
申请人:Sumitomo Chemical Company, Limited
公开号:EP1873143A1
公开(公告)日:2008-01-02
The present invention provides a salt of the formula (L)
wherein Q represents -CO- group or -C(OH)- group; ring X represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms in which a hydrogen atom is substituted by a hydroxyl group at Q position when Q is -C(OH)- group or in which two hydrogen atoms are substituted by =O group at Q position when Q is -CO- group, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may optionally be substituted by an alkyl group having 1 to 6 carbon atoms, alkoxy group having 1 to 6 carbon atoms, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; R10 and R20 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; and A+ represents organic counter ion.
The present invention also provides a chemically amplified resist composition comprising the salt of the formula (L).
本发明提供了一种式 (L) 的盐
其中 Q 代表-CO-基团或-C(OH)-基团;环 X 代表具有 3 至 30 个碳原子的单环或多环烃基;当 Q 为-C(OH)-基团时,其中一个氢原子在 Q 位被羟基取代;当 Q 为-CO-基团时,其中两个氢原子在 Q 位被 =O 基团取代、单环或多环烃类基团中的至少一个氢原子可选择被 1 至 6 个碳原子的烷基、1 至 6 个碳原子的烷氧基、1 至 4 个碳原子的全氟烷基、1 至 6 个碳原子的羟烷基、羟基或氰基取代;R10 和 R20 各自独立地代表氟原子或具有 1 至 6 个碳原子的全氟烷基;以及 A+ 代表有机反离子。
本发明还提供了一种包含式(L)盐的化学放大抗蚀剂组合物。