8-hydroxy-4-oxatricyclo[5.2.2.02,6]undecan-3-one | 479072-25-8

• 分子结构分类: 有机化合物 - 有机杂环化合物 - 内酯类
• 英文名称: 8-hydroxy-4-oxatricyclo[5.2.2.02,6]undecan-3-one
• CAS: 479072-25-8
• 化学式: C₁₀H₁₄O₃
• 分子量: 182.219
• InChiKey: OYZRGZXYLLRHDN-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  0.8
• 重原子数：
  13
• 可旋转键数：
  0
• 环数：
  4.0
• sp3杂化的碳原子比例：
  0.9
• 拓扑面积：
  46.5
• 氢给体数：
  1
• 氢受体数：
  3

文献信息

• ACID-LABILE ESTER MONOMER HAVING SPIROCYCLIC STRUCTURE, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
  申请人：Kinsho Takeshi

  公开号：US20100304295A1

  公开（公告）日：2010-12-02

  An acid-labile ester monomer of spirocyclic structure has formula (1) wherein Z is a monovalent group having a polymerizable double bond, X is a divalent group which forms a cyclopentane, cyclohexane or norbornane ring, R 2 is H or monovalent hydrocarbon, R 3 and R 4 are H or monovalent hydrocarbon, or R 3 and R 4 , taken together, stand for a divalent group which forms a cyclopentane or cyclohexane ring, and n is 1 or 2. A polymer obtained from the acid-labile ester monomer has so high reactivity in acid-catalyzed elimination reaction that the polymer may be used to formulate a resist composition having high resolution.

  一种酸敏感酯单体具有螺环结构，其化学式如下（1），其中Z是具有可聚合双键的一价基团，X是形成环戊烷、环己烷或诺邦烷环的二价基团，R2是H或一价碳氢基团，R3和R4是H或一价碳氢基团，或者R3和R4一起表示形成环戊烷或环己烷环的二价基团，n为1或2。从酸敏感酯单体获得的聚合物在酸催化消除反应中具有很高的反应性，因此可以用于制备具有高分辨率的抗蚀组合物。
• (Meth)acrylate esters, starting alcohols for the preparation thereof, processes for preparing both, polymers of the esters, chemically amplifiable resist compositions, and method for forming patterns
  申请人：——

  公开号：US20040063882A1

  公开（公告）日：2004-04-01

  The (meth)acrylate of the present invention is represented by the following formula (1). The (meth)acrylate can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol. A polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition. 1 wherein each of R 1 , R 2 , R 3 and R 4 represents a hydrogen atom, a methyl group or an ethyl group; either one of X 1 or X 2 represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A 1 and A 2 represent hydrogen atoms, or A 1 and A 2 form —O—, —CH 2 — or —CH 2 CH 2 —.

  本发明的（甲基）丙烯酸酯由以下公式（1）表示。可以通过首先通过还原1,3-二烯和马来酸酐之间的Diels-Alder反应得到的加成产物来制备内酯，然后水解内酯以产生醇，随后对醇进行（甲基）丙烯化来生产（甲基）丙烯酸酯。通过共聚合包含本发明的（甲基）丙烯酸酯的单体组成物制备的聚合物在透明度，干法蚀刻抗性和有机溶剂溶解性方面表现出色，因此最好将其用作化学放大抗蚀剂组合物的树脂。其中R1、R2、R3和R4中的每一个代表氢原子、甲基基团或乙基基团；X1或X2中的任意一个代表（甲基）丙烯酰氧基，另一个代表氢原子；A1和A2均表示氢原子，或A1和A2形成-O-，-CH2-或- -。
• (Meth)acrylate, raw material alcohol for the (meth)acrylate, method of producing the (meth)acrylate and the alcohol, polymer produced by polymerizing the (meth)acrylate, chemically amplified resist composition, and method of the formation of a pattern
  申请人：Kamon Yoshihiro

  公开号：US20050113538A1

  公开（公告）日：2005-05-26

  The (meth)acrylate of the present invention is represented by the following formula (1). The (meth)acrylate can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol. A polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition. wherein each of R 1 , R 2 , R 3 and R 4 represents a hydrogen atom, a methyl group or an ethyl group; either one of X 1 or X 2 represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A 1 and A 2 represent hydrogen atoms, or A 1 and A 2 form —O—, —CH 2 — or —CH 2 CH 2 —.

  本发明的（甲基）丙烯酸酯由以下公式（1）表示。可以通过首先通过还原1,3-二烯和马来酸酐之间的Diels-Alder反应得到的加成产物来生产内酯，然后使内酯水合生成醇，接着对醇进行（甲基）丙烯化来生产（甲基）丙烯酸酯。通过共聚或聚合包含本发明的（甲基）丙烯酸酯的单体组成的聚合物在透明度，干法蚀刻抵抗力和有机溶剂溶解性方面表现出色，因此最好用作化学增感抗蚀剂组成物的树脂。 其中，R1、R2、R3和R4中的每一个代表氢原子、甲基基团或乙基基团；X1或X2中的任意一个代表（甲基）丙烯酰氧基，另一个代表氢原子；A1和A2都代表氢原子，或者A1和A2形成-O-，-CH2-或- -。
• Novel (meth) acrylates having lactone structure, polymers, photoresist compositions and patterning process
  申请人：Shin-Etsu Chemical Co., Ltd.

  公开号：US20030008232A1

  公开（公告）日：2003-01-09

  (Meth)acrylate compounds having a norbornane, bicyclo[2.2.2]octane, 7-oxanorbornane or cyclohexane ring structure and a &ggr;-butyrolactone ring structure connected together by a suitable linker are novel and useful in forming polymers having high transparency, especially at the exposure wavelength of an excimer laser.

  (具有降冰片烷、双环[2.2.2]辛烷、7-氧杂降冰片烷或环己烷环结构和&ggr;-丁内酯环结构的（甲基）丙烯酸酯化合物，通过合适的连接剂连接在一起，是一种新颖且有用的聚合物，可形成具有高透明度的聚合物，尤其是在准分子激光的曝光波长下。
• (METH)ACRYLATE ESTERS, STARTING ALCOHOLS FOR THE PREPARATION THEREOF, PROCESSES FOR PREPARING BOTH, POLYMERS OF THE ESTERS, CHEMICALLY AMPLIFIABLE RESIST COMPOSITIONS, AND METHOD FOR FORMING PATTERNS
  申请人：MITSUBISHI RAYON CO., LTD.

  公开号：EP1352904B1

  公开（公告）日：2008-10-08