| 625836-56-8

• 分子结构分类: 有机化合物 - 有机氧化合物
• CAS: 625836-56-8
• 化学式: C₁₆H₃₀CuN₄
• 分子量: 341.987
• InChiKey: HSFHRSOIAAAVQS-JUTDPGLFSA-N

反应信息

• 作为产物：
  描述：

  copeer(II) ethanoate 、 (Z)-N-ethyl-4-methyliminopent-2-en-2-amine 以 甲苯 为溶剂， 生成
  参考文献：
  名称：

  Remarkably Volatile Copper(II) Complexes of N,N‘-Unsymmetrically Substituted 1,3-Diketimines as Precursors for Cu Metal Deposition via CVD or ALD

  摘要：

  To enhance the volatility of the copper precursor in the copper deposition process, it was envisioned that N,N'-unsymmetrically substituted 1,3-diketimines should be more volatile than their symmetrically substituted counterparts. A variety of Cu(II) (N,N'-unsymmetrically substituted 1,3-diketiminate) complexes have been synthesized and have proven to be much more volatile than their symmetrical counterparts. This makes the new materials particularly attractive to the ALD and CVD processes. Among the new compounds, 8-a and 8-b are sublimable even at room temperature.

  DOI：

  10.1021/ja051158s