An actinic ray-sensitive or radiation-sensitive resin composition comprises (A) a resin that exhibits an increased solubility in an alkali developer when acted on by an acid, and (B) at least two types of sulfonic acid generators that generate a sulfonic acid when exposed to actinic rays or radiation, wherein the two types of sulfonic acid generators (B) consist of sulfonic acid generators (B1) and (B2) satisfying the following requirements, namely the sulfonic acid generator (B1) generates a sulfonic acid composed of 9 to 20 elements with an acid strength (pKa) satisfying the relationship pKa<-3.50, and the sulfonic acid generator (B2) generates an acid composed of 17 or more elements with an acid strength (pKa) satisfying the relationship -2.00>pKa≥-3.50, provided that no hydrogen atom is included in the number of elements of the generated acids.
一种对辐射线敏感或辐射敏感的
树脂组合物包括:(A)一种在酸作用下在碱显影剂中的溶解度增加的
树脂;(B)至少两种在辐射线或辐射照射下生成
磺酸的
磺酸发生器、其中,两种
磺酸发生器(B)由满足以下要求的
磺酸发生器(B1)和(B2)组成,即
磺酸发生器(B1)生成由 9 至 20 个元素组成的
磺酸,其酸度(pKa)满足 pKapKa≥-3.50,条件是生成的酸的元素数中不包括氢原子。