申请人:Applied Materials, Inc.
公开号:US20220220137A1
公开(公告)日:2022-07-14
Molybdenum(VI) coordination complexes are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum nitride). The exposures can be sequential or simultaneous.
本文描述了
钼(VI)配合物复合物。本文还描述了在基板上沉积含
钼薄膜的方法。基板暴露于
钼前体和反应物中,以形成含
钼的薄膜(例如,元素
钼,
钼氧化物,
钼碳化物,
钼硅化物,
钼氮化物)。曝光可以是顺序的或同时进行的。