Disclosed is a water repellent additive for an immersion resist, which is composed of a fluorine-containing polymer that has a repeating unit represented by general formula (1). By adding the water repellent additive to a resist composition, the resist composition can be controlled to have high water repellency during exposure and to exhibit improved solubility in a developing solution during development.
[In the formula, R
1
represents a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group; R
2
represents a heat-labile protecting group; R
3
represents a fluorine atom or a fluorine-containing alkyl group; and W represents a divalent linking group.]
本发明涉及一种浸渍型光阻的疏
水添加剂,该添加剂由具有由通式(1)表示的重复单元的含
氟聚合物组成。通过将疏
水添加剂添加到光阻组合物中,可以控制光阻组合物在曝光期间具有高疏
水性,并在显影过程中表现出改善的溶解度。[在公式中,R1表示氢原子,
氟原子,甲基或三
氟甲基基团; R2表示热敏保护基团; R3表示
氟原子或含氟烷基团; W表示二价连接基团。]