An immersion upper layer film composition is provided which exhibits sufficient transparency for the exposure wavelength 248 nm(KrF) and 193 nm(ArF), can form a protective film on the photoresist film without being intermixed with the photoresist film, is not eluted into water used during immersion exposure to maintain a stable film, and can be easily dissolved in an alkaline developer. The composition applied to coat on the photoresist film when using an immersion exposure device which is irradiated through water provided between a lens and the photoresist film, the composition comprises a resin forming a water-stable film during irradiation and being dissolved in a subsequent developer, and a solvent containing a monovalent alcohol having 6 or less carbon atoms, and the resin contains a resin component having an alcoholic hydroxyl group on the side chain containing a fluoroalkyl group on at least the carbon atom of α-position.
                            本发明提供了一种浸入式上层膜组合物,该组合物在曝光波长为 248 nm(KrF)和 193 nm(ArF)时具有足够的透明度,可以在光刻胶膜上形成保护膜,而不会与光刻胶膜混合,在浸入式曝光过程中不会被洗脱到
水中以保持稳定的膜,并且可以很容易地溶解在碱性显影液中。在使用浸入式曝光装置时,通过透镜和光刻胶膜之间的
水照射光刻胶膜,涂覆在光刻胶膜上的组合物,该组合物包括在照射过程中形成
水稳定膜并能溶解在后续显影剂中的
树脂,以及含有 6 个或更少碳原子的一价醇的溶剂,
树脂含有侧链上具有醇羟基的
树脂成分,侧链至少在 α 位碳原子上含有氟烷基。