Synthesis and Structures of Zirconium Amide−Iodide Complexes
摘要:
Zirconium amide-iodide complexes were synthesized for possible use as chemical vapor deposition precursors to zirconium nitride films. The series of six complexes Zr(NR2)(4)-I-n(n), (R = Me or Et; n = 1-3) was prepared by reacting Zrl(4) and Zr(NR2)(4) in hot toluene. X-ray crystallographic analyses were performed for Zr(NMe2)(3)I, Zr(NEt2)(2)I-2, and Zr(NEt2)I-3. In the solid state, Zr(NMe2)(3)I and Zr(NEt2)(2)I-2 are the discrete dimers [Zr(NMe2)(2)I(mu-NMe2)](2) and [Zr(NEt2)(2)I(mu-I)](2), and Zr(NEt2)I-3 is the polymer of dimers {[Zr(NEt2)I-2(mu-I)](2)}(n). In solution, Zr(NEt2)(3)I is proposed to be monomeric on the basis of NMR data and a molecular weight determination. The complex Zr(NEt2)(3)I is the most promising precursor candidate because of its physical properties.