RESIST PROTECTIVE COATING COMPOSITION AND PATTERNING PROCESS
申请人:HARADA Yuji
公开号:US20090286182A1
公开(公告)日:2009-11-19
A protective coating composition comprising a copolymer of an alkali-soluble (α-trifluoromethyl)acrylate and a norbornene derivative as a base polymer, optionally in admixture with a second polymer containing sulfonic acid and/or sulfonic acid amine salt in repeat units is applied onto a resist film. The protective coating is effective in minimizing development defects and forming a resist pattern of improved profile.