According to the present invention, an α-substituted acrylic ester monomer for a fluorinated resist is produced by direct addition of an α-substituted acrylic acid to a fluorinated alkene in the presence of a specific acid catalyst having a sulfonyl group. By the use of such a specific acid catalyst, it is possible to achieve industrial-scale production of the α-substituted acrylic ester monomer for the fluorinated resist by carrying out the target addition reaction of the fluorinated alkene and the α-substituted acrylic acid efficiently during the occurrence of side reactions such as isomerization of the alkene, generation of a diol and excessive addition of the α-substituted acrylic acid.
根据本发明,通过在特定酸性催化剂的存在下将α-取代
丙烯酸直接加入到
氟代烯烃中,可以生产用于
氟代光刻胶的α-取代
丙烯酸酯单体。通过使用这种特定的酸性催化剂,在发生烯烃异构化、生成二元醇和α-取代
丙烯酸过量加入等副反应的同时,可以高效地进行
氟代烯烃和α-取代
丙烯酸的目标加成反应,从而实现α-取代
丙烯酸酯单体的工业规模生产。