申请人:Daicel Chemical Industries, Ltd.
公开号:EP1331216A1
公开(公告)日:2003-07-30
A monomer containing an electron-withdrawing group of the present invention is represented by following Formula (a), (b) or (c) :
wherein A1, A2, and A3 are each a ring; Ra, Rb, Rc, and Ru are the same or different and are each a hydrogen atom or organic group; at least one of Rs, Rw and Rv, at least one of Rt and Rw1, and at least one of the two Rw2s are each an electron-withdrawing group, and the others are each a hydrogen atom or organic group; W1 is a single bond or linkage group; and n denotes an integer of 2 to 25, where at least two of Ra, Rb, Rc, Rs, Rt, Ru, Rv, Rw, Rw1, Rw2, W1, and carbon atoms constituting ring A1, carbon atoms constituting ring A2, and carbon atoms constituting ring A3 may be combined to form a ring, respectively. The electron-withdrawing groups in Rs, Rt, Rv, Rw, Rw1, and Rw2 are, for example, groups each containing a fluorine atom. The monomer is useful as a raw material for photoresist polymeric compounds.
本发明中含有抽电子基团的单体由下式(a)、(b)或(c)表示:
其中 A1、A2 和 A3 各为一个环;Ra、Rb、Rc 和 Ru 相同或不同,各为一个氢原子或有机基团;Rs、Rw 和 Rv 中的至少一个,Rt 和 Rw1 中的至少一个,以及两个 Rw2 中的至少一个各为一个抽电子基团,其它各为一个氢原子或有机基团;W1是单键或连接基团;n表示2至25的整数,其中Ra、Rb、Rc、Rs、Rt、Ru、Rv、Rw、Rw1、Rw2、W1中的至少两个以及构成环A1的碳原子、构成环A2的碳原子和构成环A3的碳原子可分别组合成一个环。例如,Rs、Rt、Rv、Rw、Rw1 和 Rw2 中的抽电子基团是各自含有一个氟原子的基团。该单体可用作光阻聚合化合物的原料。