A positive resist composition comprising (A) a resin having a specific structure and capable of decomposing under action of an acid to increase solubility in an alkali developer, and (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation.
一种阳离子抗蚀剂组合物,包括:(A) 具有特定结构并能在酸作用下分解以增加在碱显影液中溶解度的
树脂;(B) 能在辐照射线或辐射照射下生成酸的化合物。