A radiation-sensitive resin composition includes a polymer, an acid generating agent, and an organic solvent. The polymer includes a first structural unit derived from a compound represented by a formula (1), and a second structural unit derived from a compound represented by a formula (2). R
1
represents an organic group having a valency of (a+2) that represents a ring structure having 3 to 8 carbon atoms together with the carbon atom constituting a lactone ring. R
2
represents a fluorine atom, a hydroxyl group, an organic group having 1 to 20 carbon atoms or the like.
一种辐射敏感的
树脂组合物,包括聚合物、产生酸的剂和有机溶剂。聚合物包括从公式(1)表示的化合物衍生的第一结构单元和从公式(2)表示的化合物衍生的第二结构单元。R1代表具有价数为(a+2)的有机基团,该有机基团与构成内酯环的碳原子一起形成具有3到8个碳原子的环结构。R2代表
氟原子、羟基、具有1到20个碳原子的有机基团或类似物。