THERMAL ACID GENERATORS AND PHOTORESIST PATTERN TRIMMING COMPOSITIONS AND METHODS
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20170123313A1
公开(公告)日:2017-05-04
Provided are ionic thermal acid generators of the following general formula (I):
wherein: Ar
1
represents an optionally substituted carbocyclic or heterocyclic aromatic group; W independently represents a group chosen from carboxyl, hydroxy, nitro, cyano, C1-5 alkoxy and formyl; X is a cation; Y independently represents a linking group; Z independently represents a group chosen from hydroxyl, fluorinated alcohols, esters, optionally substituted alkyl, C5 or higher optionally substituted monocyclic, polycyclic, fused polycyclic cycloaliphatic, or aryl, which may optionally comprise a heteroatom, provided at least one occurrence of Z is a hydroxyl group; a is an integer of 0 or greater; b is an integer of 1 or greater; provided that a+b is at least 1 and not greater than the total number of available aromatic carbon atoms of the aromatic group. Also provided are photoresist pattern trimming compositions and methods of trimming a photoresist pattern using the trimming compositions. The thermal acid generators, compositions and methods find particular applicability in the manufacture of semiconductor devices.
提供的是以下一般式(I)的离子热酸发生剂:
其中:Ar1代表一个可选取的取代的碳环或杂环芳香基团;W独立地代表从羧基,羟基,硝基,氰基,C1-5烷氧基和甲酰基中选择的一个基团;X是一个阳离子;Y独立地代表一个连接基团;Z独立地代表从羟基,氟化醇,酯类,可选取的取代烷基,C5或更高的可选取的单环,多环,融合多环环烷基或芳基中选择的一个基团,可以可选地包含一个杂原子,但至少有一个Z是一个羟基;a是大于或等于0的整数;b是大于或等于1的整数;但要求a+b至少为1且不大于芳香基团中可用的芳香碳原子的总数。此外,还提供了修剪光刻胶图案的组合物和方法。这些热酸发生剂、组合物和方法在半导体器件制造中具有特殊的适用性。