POLYMERS FOR ANTI-REFLECTIVE COATINGS, ANTI-REFLECTIVE COATING COMPOSITIONS AND METHODS OF FORMING A PATTERN USING THE SAME
申请人:MOON Sang-Sik
公开号:US20080050678A1
公开(公告)日:2008-02-28
An anti-reflective coating composition includes a solvent and about 20 to about 35 percent by weight of a polymer prepared by a condensation reaction of an acrylate polymer including a hydroxyl group with a derivative of muramic acid and a derivative of mandelic acid.