PREPARATION AND REACTIONS OF 9-ANTHRYLMAGNESIUM BROMIDE
作者:W. E. BACHMANN、M. C. KLOETZEL
DOI:10.1021/jo01218a007
日期:1938.3
COATING-TYPE COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, POLYMER, AND METHOD FOR MANUFACTURING POLYMER
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20210278766A1
公开(公告)日:2021-09-09
The present invention provides a. coating-type composition for forming an. organic film containing: a polymer having a structure shown by the following general formula (1) as a partial structure; and an organic solvent, where in the formula (1), ring structures Ar1 and Ar2 represent a benzene rive or a naphthalene ring optionally having a substituent, and W
1
represents an aryl croup having 6 to 30 carbon atoms and optionally having a substituent. This provides a coating-type composition for forming an organic film that can. form an organic film having high pattern-curving resistance and high dry-etching resistance, the composition being excellent in solvent solubility and having a low generation of defects.