PREPARATION AND REACTIONS OF 9-ANTHRYLMAGNESIUM BROMIDE
作者:W. E. BACHMANN、M. C. KLOETZEL
DOI:10.1021/jo01218a007
日期:1938.3
COATING-TYPE COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, POLYMER, AND METHOD FOR MANUFACTURING POLYMER
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20210278766A1
公开(公告)日:2021-09-09
The present invention provides a. coating-type composition for forming an. organic film containing: a polymer having a structure shown by the following general formula (1) as a partial structure; and an organic solvent, where in the formula (1), ring structures Ar1 and Ar2 represent a benzene rive or a naphthalene ring optionally having a substituent, and W
1
represents an aryl croup having 6 to 30 carbon atoms and optionally having a substituent. This provides a coating-type composition for forming an organic film that can. form an organic film having high pattern-curving resistance and high dry-etching resistance, the composition being excellent in solvent solubility and having a low generation of defects.
Anthracene‐attached tricyclic aromatic hydrocarbon radicals having different central polygons, Ant‐5, Ant‐6, and Ant‐7, were synthesized to evaluate the role of an anthracene substituent group in the stability and reactivity of tricyclic aromatic hydrocarbon radicals. The bulky anthryl group effectively protects a carbon atom with high spin density, resulting in high persistence of the radicals. On