申请人:Senkevich Joseph John
公开号:US20050227055A1
公开(公告)日:2005-10-13
The present invention relates to a method for forming a conformal coating having a reactive surface. In the method, an ultrathin layer composed of a polymer having repeating units derived from unsubstituted p-xylylene, substituted p-xylylene, phenylene vinylene, phenylene ethynylene, 1,4-methylene naphthalene, 2,6-methylene naphthalene, 1,4-vinylene naphthalene, 2,6-vinylene naphthalene, 1,4-ethynylene naphthalene, 2,6-ethynylene naphthalene, combinations thereof, precursors therefor or combinations of precursors therefor, is deposited on a substrate by a thermal CVD process. The ultrathin layer is optionally exposed to a source of oxygen and then exposed to a reagent selected from ammonium hydroxide, tetramethylammonium hydroxide, ammonium sulfide, dimethyl sulfide, thioacetic acid, sodium hydrosulfide, sodium sulfide, hydrazine, acetamide and combinations thereof. The surface may be modified readily after the treatment.
本发明涉及一种形成具有活性表面的保形涂料的方法。在该方法中,超薄层由聚合物组成,该聚合物具有来自未取代对二甲苯、取代对二甲苯、亚苯基乙烯、亚苯基乙炔、1,4-亚甲基萘、2,6-亚甲基萘、1、通过热 CVD 工艺将超薄层沉积在基底上。该超薄层可选择暴露于氧气源,然后暴露于选自氢氧化铵、四甲基氢氧化铵、硫化铵、二甲基硫醚、硫代乙酸、硫氢化钠、硫化钠、肼、乙酰胺及其组合的试剂中。处理后的表面可能很容易改性。