申请人:Hoechst Aktiengesellschaft
公开号:US05198322A1
公开(公告)日:1993-03-30
A positively operating radiation-sensitive mixture comprising a binder which is insoluble in water but soluble or at least swellable in aqueous alkaline solution, and as a photoactive component a polyfunctional .alpha.-diazo-.beta.-keto ester of the general formula I ##STR1## in which R.sup.1 denotes an aliphatic, cycloaliphatic or araliphatic or aromatic radical having 4 to 20 carbon atoms, in which individual CH.sub.2 groups can be replaced by oxygen or sulfur atoms or by ##STR2## or NH groups and/or contain keto groups, X denotes an aliphatic, cycloaliphatic, carbocyclic, heterocyclic or araliphatic radical having 2 to 22 carbon atoms, in which individual CH.sub.2 groups can be replaced by oxygen or sulfur atoms or by the groups --NR.sup.2 --, --C(O)--O--, --C(O)--NR.sup.2 --, --C(O)-- ##STR3## --NR.sup.2 --C(O)--NR.sup.3 --, --O--C(O)--NR.sup.2 --, --C(O)-- ##STR4## or --O--C(O)--O--, or CH groups can be replaced by ##STR5## in which R.sup.2 and R.sup.3 independently of one another represent hydrogen or an aliphatic, carbocyclic or araliphatic radical, m denotes an integer from 2 to 10 and n denotes an integer from 0 to 2, wherein m-n is .gtoreq.2, is described. The radiation-sensitive mixture is particularly suitable for exposure using radiation of wavelength 190 to 300 nm.
一种正向作用的辐射敏感混合物,包括一种粘合剂,该粘合剂在水中不溶解,但在水性碱性溶液中可溶解或至少溶胀,并且作为光活性组分的多功能α-二氮基-β-酮酯的一般式I,其中R1代表具有4至20个碳原子的脂肪族、环脂肪族或芳基或芳香基,其中单个CH2基团可被氧或硫原子或##STR2##或NH基取代和/或含有酮基,X代表具有2至22个碳原子的脂肪族、环脂肪族、碳环、杂环或芳基,其中单个CH2基团可被氧或硫原子或由群--NR2--,--C(O)--O--,--C(O)--NR2--,--C(O)--##STR3##--NR2--C(O)--NR3--,--O--C(O)--NR2--,--C(O)--##STR4##或--O--C(O)--O--取代,或CH基团可被##STR5##取代,其中R2和R3独立地代表氢或脂肪族、碳环或芳基,m表示2到10之间的整数,n表示0到2之间的整数,其中m-n是≥2。这种辐射敏感混合物特别适用于使用波长为190至300纳米的辐射进行曝光。