Novel cinnamaldehyde compound having an azido group
申请人:——
公开号:US20030191329A1
公开(公告)日:2003-10-09
The invention provides a novel azidocinnamaldehyde compound which, when used as an intermediate for providing a photosensitive moiety of a photoresist, introduces a photosensitive moiety having high sensitivity and attaining high contrast between the exposed portion and the unexposed portion, and which per se can serve as a photosensitive moiety. The azidocinnamaldehyde compound is represented by formula(I):
1
wherein R represents a lower alkyl group and Y represents hydrogen or a sulfonate salt group.