IrIII metallacycle rapidly and selectively catalyses the reduction of various esters, carboxylic acids, ketones, and aldehydes. The reactions proceed in high yields at room temperature by hydrosilylation followed by desilylation. Depending on the substrate, esters are reduced to alcohols or ethers and carboxylic acids to alcohols or aldehydes.
BASIC COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Hatakeyama Jun
公开号:US20120141938A1
公开(公告)日:2012-06-07
A chemically amplified resist composition comprising a base polymer, an acid generator, and an amine quencher in the form of a β-alanine, γ-aminobutyric acid or 5-aminovaleric acid derivative having an acid labile group-substituted carboxyl group has a high contrast of alkaline dissolution rate before and after exposure and forms a pattern of good profile at a high resolution, minimal roughness and wide focus margin.
HEMIACETAL COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20160238930A1
公开(公告)日:2016-08-18
A polymer for resist use is obtainable from a hemiacetal compound having formula (1
a
) wherein R
1
is H, CH
3
or CF
3
, R
2
to R
4
each are H or a monovalent hydrocarbon group, X
1
is a divalent hydrocarbon group, ZZ designates a non-aromatic mono- or polycyclic ring of 4 to 20 carbon atoms having a hemiacetal structure, k
1
=0 or 1, and k
2
=0 to 3. A resist composition comprising the polymer displays controlled acid diffusion and low roughness during both positive and negative tone developments.
COMPOSITION FOR RESIST UNDERLAYER FILM FORMATION, UNDERLAYER FILM FOR LITHOGRAPHY, AND PATTERN FORMATION METHOD
申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:US20200249573A1
公开(公告)日:2020-08-06
The present invention provides a composition for resist underlayer film formation comprising a tellurium-containing compound or a tellurium-containing resin.
本发明提供了一种用于抗蚀底层膜形成的组合物,其包括含碲化合物或含碲树脂。
MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20140045123A1
公开(公告)日:2014-02-13
A polymer comprising recurring units derived from a (meth)acrylate monomer of tertiary ester type having branched alkyl on alicycle is used to form a resist composition. When subjected to exposure, PEB and organic solvent development, the resist composition is improved in dissolution contrast.