申请人:Ciba Specialty Chemicals Corporation
公开号:US06512020B1
公开(公告)日:2003-01-28
Compounds of formula I, II and III, wherein
wherein R1 is for example hydrogen, C1-C12alkyl, C3-C30cycloalkyl, C2-C12alkenyl, C4-C8cycloalkenyl, phenyl, which is unsubstituted or substituted, naphthyl, anthracyl or phenanthryl, unsubstituted or substituted, heteroaryl radical which is unsubstituted or substituted; wherein all radicals R1 with the exception of hydrogen can additionally be substituted by a group having a —O—C-bond or a —O—Si-bond which cleaves upon the action of an acid; R′1 is for example phenylene, naphthylene, diphenylene or oxydiphenylene, wherein these radicals are unsubstituted or substituted; R2 is halogen or C1-C10haloalkyl; R3 is for example C1-C18alkylsulfonyl, phenylsulfonyl, naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, wherein the groups are unsubstituted or substituted, or R3 is e.g. C2-C6haloalkanoyl, or halobenzoyl, R′3 is for example phenylenedisulfonyl, naphthylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, wherein these radicals are unsubstituted or substituted, X is halogen; are especially suitable as photosensitive acid-donors in chemically amplified resist formulations.
式I、II和III的化合物,其中R1例如是氢、C1-C12烷基、C3-C30环烷基、C2-C12烯基、C4-C8环烯基、苯基(未取代或取代)、萘基、蒽基或菲基(未取代或取代)、未取代或取代的杂环芳基;其中除氢外,所有基团R1还可以通过具有—O—C键或—O—Si键的基团取代,该基团在酸的作用下断裂;R′1例如是苯基、萘基、二苯基或氧二苯基,这些基团未取代或取代;R2是卤素或C1-C10卤代烷基;R3例如是C1-C18烷基磺酰基、苯基磺酰基、萘基磺酰基、蒽基磺酰基或菲基磺酰基,这些基团未取代或取代,或者R3例如是C2-C6卤代烷酰基或卤苯甲酰基,R′3例如是苯基二磺酰基、萘基二磺酰基、二苯基二磺酰基或氧二苯基二磺酰基,这些基团未取代或取代,X是卤素;在化学增感胶的配方中,这些化合物特别适用作为光敏酸供体。