ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, MASK BLANK PROVIDED WITH ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, PHOTOMASK, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, ELECTRONIC DEVICE, COMPOUND, AND METHOD FOR PRODUCING COMPOUND
申请人:FUJIFILM Corporation
公开号:US20160280621A1
公开(公告)日:2016-09-29
The composition contains an alkali-soluble resin and a crosslinking agent that is represented by the following General Formula (I). In the formula, each of R
1
and R
6
independently represents a hydrogen atom or a hydrocarbon group having 5 or less carbon atoms; each of R
2
and R
5
independently represents an alkyl group, a cycloalkyl group, an aryl group, or an acyl group; and each of R
3
and R
4
independently represents a hydrogen atom or an organic group having 2 or more carbon atoms, and R
3
and R
4
may be bonded to each other to form a ring.
该组合物包含一种碱溶性树脂和一种由下列通式(I)表示的交联剂。在该式中,R1和R6各自独立地表示氢原子或具有5个或更少碳原子的碳氢基团;R2和R5各自独立地表示烷基、环烷基、芳基或酰基;R3和R4各自独立地表示氢原子或具有2个或更多碳原子的有机基团,且R3和R4可以结合形成环。