Provided is a thin-film forming raw material, which is used in an atomic layer deposition method, including a magnesium compound represented by the following general formula (1):
where R
1
represents an isopropyl group, a sec-butyl group, or a tert-butyl group. A thin-film containing a magnesium atom is produced on a surface of a substrate with high productivity through use of the raw material.
提供了一种用于原子层沉积方法的薄膜形成原料,包括由以下一般式(1)表示的
镁化合物:
其中,R1代表异丙基基团、仲丁基团或叔丁基团。通过使用该原料,在基板表面上高效地生产含有
镁原子的薄膜。