Acetal compounds in which a 5- or 6-membered ring acetal structure is connected to a norbornene structure through a linker represented by —(CH
2
)
m
— in which one hydrogen atom may be substituted with a hydroxyl or acetoxy group, and m is from 1 to 8 are novel. Using the acetal compounds as a monomer, polymers are obtained. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation and has excellent sensitivity, resolution, and etching resistance.
新颖的
乙缩醛化合物,其中5-或6-成员环
乙缩醛结构通过链连接到诺博尔烯结构,链由—(
CH2)m—表示,其中一个氢原子可以被羟基或乙酰氧基替代,m为1至8。使用
乙缩醛化合物作为单体,可以获得聚合物。以该聚合物为基础
树脂的抗蚀剂组合物对高能辐射敏感,具有优异的敏感性、分辨率和蚀刻抗性。