Fluorinated Aminoalkoxide and Ketoiminate Indium Complexes as MOCVD Precursors for In<sub>2</sub>O<sub>3</sub> Thin Film Deposition
作者:Tsung-Yi Chou、Yun Chi、Shu-Fen Huang、Chao-Shiuan Liu、Arthur J. Carty、Ludmila Scoles、Konstantin A. Udachin
DOI:10.1021/ic034588x
日期:2003.9.1
The syntheses of two distinctive types of indium complex derivedfrom trimethylindium (InMe(3)) are reported. The first kind has a generalized structural formula [InMe(2)(amak)](2), where (amak)H is an abbreviation for a series of chelating aminoalcohol ligands HOC(CF(3))(2)CH(2)NHR, R = (CH(2))(2)OMe (1), Me (2), and Bu(t) (3), as well as HOC(CF(3))(2)CH(2)NMe(2) (4); while the second type of complex
Synthesis and Characterization of Fluorinated Aminoalkoxide and Iminoalkoxide Gallium Complexes: Application in Chemical Vapor Deposition of Ga<sub>2</sub>O<sub>3</sub> Thin Films
作者:Yun Chi、Tsung-Yi Chou、Yi-Jen Wang、Shu-Fen Huang、Arthur J. Carty、Ludmila Scoles、Konstantin A. Udachin、Shie-Ming Peng、Gene-Hsiang Lee
DOI:10.1021/om034148d
日期:2004.1.1
OC(CF3)2CH2NHMe (3), OC(CF3)2CH2NHBut (4), OC(CF3)2CH2NMe2 (5), in high yields. The crystalstructure of 5 was determined by X-ray diffraction, showing a distorted-tetrahedral framework which differs greatly from that observed in the trigonal-bipyramidal Ga complexes 1 and 2. Variable-temperature 1H NMR studies on 3 and 4 indicated the occurrence of rapid N→Ga bond scission, followed by recoordination