MONOMER FOR FORMING ORGANIC ANTI-REFLECTIVE COATING LAYER, POLYMER THEREOF AND COMPOSITION INCLUDING THE SAME
申请人:KIM Sang-Jeoung
公开号:US20080131815A1
公开(公告)日:2008-06-05
A monomer for forming an organic anti-reflective coating layer, a polymer thereof and a composition including the same are disclosed. In a photolithography process, the organic anti-reflective coating layer absorbs an exposed light between a layer to be etched and a photoresist layer, and prevents a photoresist pattern from collapsing due to a standing wave generated under the photoresist layer. The polymer for forming an organic anti-reflective coating layer includes a repeating unit represented by Formula
wherein, R
1
is a hydrogen atom, a methyl group or an ethyl group, R
2
is a C
1
˜C
20
alkylene group, a C
3
˜C
20
cycloalkylene group or a C
6
˜C
20
aromatic hydrocarbon group, POSS is a polyhedral-oligomeric-silsesquioxane, and m is an integer of 2 to 110.