[EN] ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM AND PATTERN FORMING METHOD USING THE COMPOSITION, AND ELECTRONIC DEVICE PRODUCING METHOD AND ELECTRONIC DEVICE<br/>[FR] COMPOSITION DE RÉSINE SENSIBLE À UN RAYONNEMENT OU SENSIBLE AUX RAYONS ACTINIQUES, FILM SENSIBLE À UN RAYONNEMENT OU SENSIBLE AUX RAYONS ACTINIQUES ET PROCÉDÉ FORMANT MOTIF UTILISANT LA COMPOSITION ET PROCÉDÉ DE PRODUCTION DE DISPOSITIF ÉLECTRONIQUE ET DISPOSITIF ÉLECTRONIQUE
申请人:FUJIFILM CORP
公开号:WO2014017408A1
公开(公告)日:2014-01-30
An actinic ray-sensitive or radiation-sensitive resin composition with few pattern collapse, which has an excellent pattern roughness property such as exposure latitude and LWR, and of which the performance over time do not fluctuate much, contains a compound represented by the following general formula (1). The respective symbols in the general formula represent the meanings described in claims.