[EN] IMPRINTING METHOD AND CURABLE COMPOSITION FOR IMPRINTING<br/>[FR] PROCÉDÉ D'IMPRESSION ET COMPOSITION DURCISSABLE POUR L'IMPRESSION
申请人:CANON KK
公开号:WO2014084395A1
公开(公告)日:2014-06-05
A curable composition for imprinting in a condensable gas atmosphere, wherein the maximum condensable gas solubility (gas/(curable composition + gas)) (g/g) is 0.1 or more and 0.4 or less, and the curable composition for imprinting has a viscosity of 40cP or less at 23℃. The maximum condensable gas solubility is determined by charging a 9-ml brown bottle with 3 g of the curable composition, measuring the weight of the curable composition at 23℃ at 1 atm before and after bubbling of the condensable gas at a flow rate of 0.1 L/min for 15 minutes, and dividing the increased weight due to the bubbling by the total weight of the curable composition and the condensable gas.