Synthesis and Characterization of First Row Transition Metal Complexes Containing alpha-keto Hydrazonate Ligands as Potential Precursors for Use in Metal Film Deposition
申请人:WAYNE STATE UNIVERSITY
公开号:US20140161977A1
公开(公告)日:2014-06-12
A compound that is useful for forming a metal by reaction with a reducing agent is described by formula (I):
wherein
M is a metal selected from Groups 3 through 12 of the Periodic Table;
R
1
and R
2
are each independently H or C
1
-C
6
alkyl; and
R
3
is H or C
1
-C
8
. alkyl.