申请人:Rohm and Haas Electronic Materials LLC
公开号:US20130084525A1
公开(公告)日:2013-04-04
A photoacid generator compound has the formula (I):
[A-(CHR
1
)
p
]
k
-(L)-(CH
2
)
m
—(C(R
2
)
2
)
n
—SO
3
−
Z
+
(I)
wherein A is a substituted or unsubstituted, monocyclic, polycyclic, or fused polycyclic C
5
or greater cycloaliphatic group optionally comprising O, S, N, F, or a combination comprising at least one of the foregoing, R
1
is H, a single bond, or a substituted or unsubstituted C
1-30
alkyl group, wherein when R
1
is a single bond, R
1
is covalently bonded to a carbon atom of A, each R
2
is independently H, F, or C
1-4
fluoroalkyl, wherein at least one R
2
is not hydrogen, L is a linking group comprising a sulfonate group, a sulfonamide group, or a C
1-30
sulfonate or sulfonamide-containing group, Z is an organic or inorganic cation, p is an integer of 0 to 10, k is 1 or 2, m is an integer of 0 or greater, and n is an integer of 1 or greater. A precursor compound to the photoacid generator, a photoresist composition including the photoacid generator, and a substrate coated with the photoresist composition, are also disclosed.
一种光酸发生剂化合物的化学式(I)如下:[A-(CHR1)p]k-(L)-(CH2)m—(C(R2)2)n—SO3−Z+(I),其中A是取代或未取代的单环、多环或融合多环的C5或更大的环烷基团,可选包含O、S、N、F或至少其中一种的组合,R1为H、单键或取代或未取代的C1-30烷基团,当R1为单键时,R1与A的碳原子共价键结,每个R2独立地为H、F或C1-4氟烷基,其中至少一个R2不为氢,L是包含磺酸基、磺酰胺基或C1-30含磺酸或磺酰胺基的连接基团,Z是有机或无机阳离子,p为0到10的整数,k为1或2,m为0或更大的整数,n为1或更大的整数。还公开了光酸发生剂的前体化合物、包括光酸发生剂的光刻胶组合物以及涂有光刻胶组合物的基板。