(1R,2S)-1-[1-[(8aS)-2,6-dihydroxy-1,2,3,8a-tetrahydronaphthalen-1-yl]cyclohexyl]-1,2,3,8a-tetrahydronaphthalene-2,6-diol

• 分子结构分类: 有机化合物 - 有机氧化合物
• 英文名称: (1R,2S)-1-[1-[(8aS)-2,6-dihydroxy-1,2,3,8a-tetrahydronaphthalen-1-yl]cyclohexyl]-1,2,3,8a-tetrahydronaphthalene-2,6-diol
• 化学式: C₂₆H₃₂O₄
• 分子量: 408.5
• InChiKey: XZWMYXUKPAKUBC-MGBSEAJRSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  4.5
• 重原子数：
  30
• 可旋转键数：
  2
• 环数：
  5.0
• sp3杂化的碳原子比例：
  0.54
• 拓扑面积：
  80.9
• 氢给体数：
  4
• 氢受体数：
  4

文献信息

• RESIST COMPOSITION, RESIST PATTERN FORMATION METHOD, POLYPHENOL COMPOUND USED THEREIN, AND ALCOHOL COMPOUND CAPABLE OF BEING DERIVED THEREFROM
  申请人：Mitsubishi Gas Chemical Company, Inc.

  公开号：EP2743769A1

  公开（公告）日：2014-06-18

  The present invention provides a resist composition containing a compound represented by the general formula (1) or (2), a method for forming a resist pattern using the composition, a polyphenolic compound for use in the composition, and an alcoholic compound that can be derived therefrom. wherein R1 are each independently a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms wherein the hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a heteroatom, or an aromatic group having 6 to 30 carbon atoms; R2 are each independently a hydrogen atom, a halogen atom, a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group and may be the same or different on the same naphthalene ring; at least one of R2 is a hydroxyl group; n is an integer of 1 to 4; the structural formulas of the repeating units in the formulas (1) and (2) may be the same or different; in the general formula (1), m1 are each independently an integer of 1 to 7; and in the general formula (2), X are each independently an oxygen atom or a sulfur atom, and m2 are each independently an integer of 1 to 6.

  本发明提供了一种含有通式（1）或（2）所代表的化合物的抗蚀剂组合物、一种使用该组合物形成抗蚀剂图案的方法、一种用于该组合物的多酚化合物，以及一种可从该组合物中提取的醇类化合物。 其中 R1 各自独立地为单键或具有 1 至 30 个碳原子的 2n 价烃基，其中烃基可以是环烃基、双键、杂原子或具有 6 至 30 个碳原子的芳香基；R2 各自独立地为氢原子、卤素原子、具有 1 至 10 个碳原子的直链、支链或环状烷基、具有 6 至 10 个碳原子的芳基、具有 2 至 10 个碳原子的烯基或羟基，在同一萘环上可以相同或不同；R2中至少有一个是羟基； n是1至4的整数；式（1）和式（2）中重复单元的结构式可以相同或不同；通式（1）中，m1各自独立地是1至7的整数；通式（2）中，X各自独立地是氧原子或硫原子，m2各自独立地是1至6的整数。