[EN] SYNTHESIS OF TRITHIOCARBONATE RAFT GENTS AND INTERMEDIATES THEREOF [FR] SYNTHÈSE DES AGENTS DE MASSE DU TRITHIOCARBONATE ET DE LEURS SUBSTANCES INTERMÉDIAIRES
PROCESSES FOR REMOVING SULFUR-CONTAINING END GROUPS FROM POLYMERS
申请人:FARNHAM WILLIAM BROWN
公开号:US20130109816A1
公开(公告)日:2013-05-02
This invention provides a method for removing certain sulfur-containing end groups from polymers, especially those made via RAFT polymerization processes. A solution of radical initiator is used in the method to accomplish removal of the certain sulfur-containing end groups.
A pattern-forming method includes forming a base pattern having recessed portions on a front face side of a substrate directly or via other layer. The recessed portions of the base pattern are filled with a first composition to form a filler layer. Phase separation of the filler layer is allowed to form a plurality of phases of the filler layer. A part of the plurality of phases of the filler layer is removed to form a miniaturized pattern. The forming of the base pattern includes: forming a resist pattern on the front face side of the substrate; forming a layer of a second polymer on lateral faces of the resist pattern; and forming a layer of a third polymer that differs from the second polymer on a surface of the substrate or on a surface of the other layer.