申请人:Nakatsuji Junya
公开号:US20140194655A1
公开(公告)日:2014-07-10
Disclosed is a fluorine-containing aromatic compound represented by the following general formula (1) and its production method. In the formula (1), R
1
is a hydroxyl group or amino group, each of R
2
to R
5
is independently a hydrogen atom, or a C
1-4
straight chain or a C
3
or C
4
branched chain alkyl group, hydrogen atoms of the alkyl group may partially or totally be replaced with fluorine atoms, n is an integer of 0 to 2, and each of m and l is independently 0 or 1. A polymer derived from this fluorine-containing aromatic compound contains —C(CF
3
)
2
OH group at a position away from the polymer main chain. Therefore, it is useful for resist use.
揭示了一种含氟芳香化合物,其通式如下(1),以及其生产方法。在式(1)中,R1是羟基或氨基,R2至R5中的每一个独立地是氢原子,或者是C1-4直链或C3或C4支链烷基基团,烷基基团的氢原子可以部分或完全被氟原子取代,n是0到2的整数,m和l中的每一个独立地是0或1。从这种含氟芳香化合物衍生的聚合物在远离聚合物主链的位置含有—C(CF3)2OH基团。因此,它适用于抗蚀用途。