Provided is an actinic ray-sensitive or radiation-sensitive resin composition including: (A) a resin including a repeating unit (a) represented by Formula (1); (B) a compound that generates an acid by irradiation with actinic rays or radiation; and (C) an organic solvent. A concentration of solid contents of the actinic ray-sensitive or radiation-sensitive resin composition is 4 mass% or less. (in the formula, R11 and R12 each independently represent a hydrogen atom, a halogen atom, or a monovalent organic group. R13 represents a hydrogen atom, a halogen atom, or a monovalent organic group or is a single bond or an alkylene group, and is bonded to L or Ar in the formula to form a ring. L represents a single bond or a divalent linking group. Ar represents an aromatic ring group. n represents an integer of 2 or more.)
本发明提供了一种对辐射线敏感或辐射敏感的
树脂组合物,其中包括:(A) 包含由式 (1) 表示的重复单元 (a) 的
树脂;(B) 通过辐射线或辐射照射生成酸的化合物;以及 (C) 有机溶剂。放 射线敏感或辐射敏感
树脂组合物的固体含量浓度为 4 质量%或以下。(式中:R11 和 R12 各自独立地代表氢原子、卤素原子或一价有机基团。R13 代表氢原子、卤素原子或一价有机基团,或者是单键或亚烷基,并与式中的 L 或 Ar 键合形成环。L 代表单键或二价连接基团。Ar 代表芳香环基团。n 代表 2 或 2 以上的整数)。