申请人:FUJIFILM Corporation
公开号:EP1972641A2
公开(公告)日:2008-09-24
A resist composition comprises (A) at least two kinds of resins each of which decomposes by the action of an acid to undergo an increase in its solubility for an alkali developer, wherein at least one kind of the resins (A) is a resin synthesized by living radical polymerization using a chain transfer agent represented by formula (I):
wherein:
A represents an organic group not containing hetero atoms; and
Y represents an organic group capable of releasing a radical.
一种抗蚀剂组合物包括 (A) 至少两种树脂,每种树脂在酸的作用下分解,对碱显影剂的溶解度增加,其中至少一种树脂 (A) 是使用由式 (I) 表示的链转移剂通过活自由基聚合合成的树脂:
其中
A 代表不含杂原子的有机基团;以及
Y 代表能够释放自由基的有机基团。