[EN] LITHOGRAPHICALLY PRODUCED FEATURES<br/>[FR] CARACTÉRISTIQUES PRODUITES PAR LITHOGRAPHIE
申请人:UNIV QUEENSLAND
公开号:WO2014127430A1
公开(公告)日:2014-08-28
The present invention relates to a method for modifying line edge roughness on a lithographically-produced feature in a material, the method comprising applying a block copolymer to an area on the feature having line edge roughness, the block copolymer comprising a charged hydrophilic polymer block and a non-charged hydrophilic polymer block.