Disclosed herein is a method for producing a composition for resist top coat layer, the method including: polymerizing a monomer solution containing a fluorine-containing monomer in a presence of a polymerization initiator that cleaves to generate an active species having 7 or more carbon atoms in total to obtain a fluorine-containing resin A; and mixing the fluorine-containing resin A and a solvent.
本文公开了一种用于生产抗蚀剂面漆层组合物的方法,该方法包括:在聚合
引发剂存在下,聚合含有含
氟单体的单体溶液,聚合
引发剂裂解生成总共具有 7 个或更多碳原子的活性物种,从而获得含
氟树脂 A;以及混合含
氟树脂 A 和溶剂。