Production method of composition for resist top coat layer, method of forming resist pattern, production method of fluorine-containing resin, and method of improving water repellency of resist top coat layer
申请人:JSR CORPORATION
公开号:US11340528B2
公开(公告)日:2022-05-24
Disclosed herein is a method for producing a composition for resist top coat layer, the method including: polymerizing a monomer solution containing a fluorine-containing monomer in a presence of a polymerization initiator that cleaves to generate an active species having 7 or more carbon atoms in total to obtain a fluorine-containing resin A; and mixing the fluorine-containing resin A and a solvent.
本文公开了一种用于生产抗蚀剂面漆层组合物的方法,该方法包括:在聚合引发剂存在下,聚合含有含氟单体的单体溶液,聚合引发剂裂解生成总共具有 7 个或更多碳原子的活性物种,从而获得含氟树脂 A;以及混合含氟树脂 A 和溶剂。