Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt comprising substrates
申请人:BASF SE
公开号:US10899945B2
公开(公告)日:2021-01-26
Use of a chemical mechanical polishing (CMP) composition (Q) for chemical mechanical polishing of a substrate (S) comprising (i) cobalt and/or (ii) a cobalt alloy and (iii) Ti N and/or TaN, wherein the CMP composition (Q) comprises (E) Inorganic particles (F) at least one organic compound comprising an amino-group and an acid group (Y), wherein said compound comprises n amino groups and at least n+1 acidic protons, wherein n is a integer≥1. (G) at least one oxidizer in an amount of from 0.2 to 2.5 wt.-% based on the total weight of the respective CMP composition, (H) an aqueous medium wherein the CMP composition (Q) has a pH of more than 6 and less than 9.
USE OF A CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION FOR POLISHING OF COBALT COMPRISING SUBSTRATES
申请人:BASF SE
公开号:EP3334794B1
公开(公告)日:2020-02-19
CHEMICAL MECHANICAL POLISHING COMPOSITION
申请人:BASF SE
公开号:EP3714012A1
公开(公告)日:2020-09-30
[EN] CHEMICAL MECHANICAL POLISHING COMPOSITION<br/>[FR] COMPOSITION DE POLISSAGE CHIMICO-MÉCANIQUE
申请人:BASF SE
公开号:WO2019101555A1
公开(公告)日:2019-05-31
The presently claimed subject matter is directed to a chemical mechanical polishing (CMP) com- position comprising inorganic particles, at least one organic compound comprising an amino group and/or at least one acid group (Y), potassium persulfate, at least one corrosion inhibitor and an aqueous medium for polishing substrates of the semiconductor industry comprising cobalt and/or a cobalt alloy and TiN and/or TaN.
Tetrazole compounds.<b>8</b>. Synthesis of tetrazolylpyrimidines from tetrazolyl-substituted enamino ketones
作者:Gerhard W. Fischer
DOI:10.1002/jhet.5570300610
日期:1993.12
Tetrazolyl-substitutedenaminoketones 1 react with various amidines 2 to give 5-(1-phenyl-1H-tetrazol-5-yl)pyrimidines 3. In the case of the chloroacetyl enamine 4 4-(N,N-dimethylaminomethyl)-substituted tetra-zolylpyrimidines 5 were obtained. Subsequent hydrolysis of the 4-trifluoromethyl derivatives 3b, 3d and 3g afforded the corresponding 5-(1-phenyl-1H-tetrazol-5-yl)pyrimidine-4-carboxylic acids
四唑基-取代的烯氨基酮1与各种脒反应2,得到5-(1-苯基- 1 H ^ -四唑-5-基)嘧啶3。在氯乙酰基烯胺4的情况下,获得4-(N,N-二甲基氨基甲基)-取代的四-唑基嘧啶5。随后将4-三氟甲基衍生物3b,3d和3g水解,得到相应的5-(1-苯基-1 H-四唑-5-基)嘧啶-4-羧酸6。