申请人:——
公开号:US20030175620A1
公开(公告)日:2003-09-18
The present invention provides a chemical amplification type positive resist composition comprising a resin having structural units of the following general formulae (I) and (II) and insoluble or poorly soluble itself in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid; an acid generating agent; and a multifunctional epoxy compound:
1
wherein, R
1
, R
2
and R
3
represent each independently hydrogen, halogen, hydroxyl group, alkyl group having 1 to 14 carbon atoms, alicyclic group or lactone ring group,
wherein at least one hydrogen on the alicyclic group or on the lactone ring group may independently be substituted by halogen, hydroxyl group or alkyl group and at least one hydrogen on the alkyl group may independently be substituted by halogen, hydroxyl group or alicyclic ring group;
n and 1 represent each independently an integer of 0 to 4;
R
4
and R
5
represent each independently hydrogen or alkyl group having 1 to 4 carbon atoms; and
either or both of R
6
and R
7
represent fluoroalkyl group having 1 to 6 carbon atoms and when both of R
6
and R
7
do not represent said fluoroalkyl group, rest of R
6
and R
7
represents hydrogen or alkyl group having 1 to 6 atoms; and
R
8
represents an acid-unstable group dissociating in the presence of an acid.
本发明提供了一种化学放大型正抗蚀剂组合物,该组合物包括具有以下通式(I)和(II)结构单元的树脂,其本身不溶于或难溶于碱水溶液,但在酸的作用下可溶于碱水溶液;一种酸生成剂;以及一种多功能环氧化合物:
1
其中,R
1
, R
2
和 R
3
各自独立地代表氢、卤素、羟基、具有 1 至 14 个碳原子的烷基、脂环基或内酯环基、
其中脂环基或内酯环基上的至少一个氢可独立地被卤素、羟基或烷基取代,烷基上的至少一个氢可独立地被卤素、羟基或脂环基取代;
n 和 1 分别独立地代表 0 至 4 的整数;
R
4
和 R
5
各自独立地代表氢或具有 1 至 4 个碳原子的烷基;以及
R
6
和 R
7
代表具有 1 至 6 个碳原子的氟烷基,且当两个 R
6
和 R
7
不代表所述氟烷基时,R
6
和 R
7
代表氢或具有 1 至 6 个原子的烷基;以及
R
8
代表在酸存在下离解的酸不稳定基团。