A (meth)acrylic monomer is represented by general formula (1) (wherein R1 represents a hydrogen atom or a methyl group; R2 to R4 independently represent —CH3 or —CH2—O—R5, wherein at least one of R2 to R4 represents —CH2—O—R5; R5 represents an alkyl group having 1 to 4 carbon atoms; and Z represents multiple atoms necessary for the formation of an alicyclic hydrocarbon group having 3 to 10 carbon atoms in conjunction with a carbon atom). The (meth)acrylic monomer has a property of high acid degradability and can be removed by the action of an acid.
(甲基)
丙烯酸单体由通式(1)表示(其中 R1 代表氢原子或甲基;R2 至 R4 独立地代表-
CH3 或-
CH2-O-R5,其中 R2 至 R4 中至少有一个代表- -O-R5;R5 代表具有 1 至 4 个碳原子的烷基;Z 代表与碳原子结合形成具有 3 至 10 个碳原子的脂
环烃基所需的多个原子)。(甲基)
丙烯酸单体具有较高的酸降解性,可在酸的作用下去除。