The invention relates to new metal complexes having N-aminoamidinate ligands, more particularly metal complexes having Ν,Ν'-bis(dimethylamino)acetamidinate, N,N'-bis(dimethylamino)formamidinate, N-dimethylaminoacetamidinate or N-dimethylamino-N'-isopropyl-acetamidinate ligands as well as to their preparation and use. The metal complexes are characterized by a five-membered chelate ring. The metal complexes are formed with the metals from the main groups of the PTE, but also with transition-group elements such as tantalum (Ta), iron (Fe), cobalt (Co), nickel (Ni), copper (Cu) or zinc (Zn), and also with precious metals such as palladium (Pd). The complexes of the invention find use as precursors for the preparation of functional layers by means of gas-phase thin-film processes such as CVD, MO-CVD and ALD. Additionally they may be used as catalysts for olefin hydroamination and for olefin polymerization.
该发明涉及具有N-
氨基甲酸酰胺
配体的新
金属配合物,更具体地说,涉及具有Ν,Ν'-双(
二甲氨基)乙酰胺基
甲酸酰胺基、N,N'-双(
二甲氨基)甲酰胺基
甲酸酰胺基、N-
二甲氨基乙酰胺基
甲酸酰胺基或N-
二甲氨基-N'-异丙基乙酰胺基
甲酸酰胺基
配体的
金属配合物,以及它们的制备和使用。这些
金属配合物的特点是具有五元螯合环。这些
金属配合物与主族元素
PTE的
金属形成,也与过渡族元素如
钽(Ta)、
铁(Fe)、
钴(Co)、
镍(Ni)、
铜(Cu)或
锌(Zn)以及贵
金属如
钯(Pd)形成。该发明的配合物可用作通过气相薄膜工艺(如CVD、MO-CVD和ALD)制备功能层的前体。此外,它们还可用作烯烃
氢胺化和烯烃聚合的催化剂。