Provided are polymers derived from bridged heterocyclic compounds, fluorinated norbornene compounds, fluorinated alkenes, heterocyclic compounds, and combinations of two or more thereof for use in a wide variety of applications, including photoresist compositions. Also provided are methods for producing the monomer compounds for use in the present polymers.
                            本发明提供了由桥接
杂环化合物、
氟化
降冰片烯化合物、
氟化烯、
杂环化合物以及其中两种或两种以上化合物的组合衍生的聚合物,可用于包括光刻胶组合物在内的多种应用中。此外,还提供了用于本聚合物的单体化合物的生产方法。