Novel compound and method of producing the same, acid generator, resist composition and method of forming resist pattern
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:EP2073060A1
公开(公告)日:2009-06-24
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) consisting of a compound represented by general formula (b1-1) shown below:
wherein Rx represents a hydrocarbon group which may have a substituent exclusive of a nitrogen atom; each of Q2 and Q3 independently represents a single bond or a divalent linkage group; Y1 represents an alkylene group or fluorinated alkyl group of 1 to 4 carbon atoms; and Z+ represents an organic cation exclusive of an ion represented by general formula (w-1).
一种抗蚀剂组合物,包括在酸作用下碱显影溶液中的溶解度会发生变化的碱成分(A)和在接触时会产生酸的酸生成成分(B),酸生成成分(B)包括由下图所示通式(b1-1)所代表的化合物组成的酸生成物(B1):
其中 Rx 代表烃基,该烃基可能具有不包括氮原子的取代基;Q2 和 Q3 各自独立地代表单键或二价连接基;Y1 代表 1 至 4 个碳原子的亚烷基或氟化烷基;Z+ 代表不包括通式(w-1)所代表离子的有机阳离子。