申请人:Hitachi, Ltd.
公开号:EP0061689A1
公开(公告)日:1982-10-06
A radiation sensitive polymer material comprising a polymer having (a) one ore more repeating units of the formula:
wherein R is an alkyl group, a halogen atom, a hydrogen atom or a dimethylamino group, and (b) an addition polymerizable repeating unit derived from a compound having a CH2 = C group in the molecule, and if necessary, one hydrate of metal chloride or nitrate, can give a positive type resist having excellent resistance to dry etching and being highly sensitive to radiation.
一种辐射敏感聚合物材料,包括一种聚合物,该聚合物具有(a)一个或多个式中的重复单元:
其中 R 是一个烷基、一个卤素原子、一个氢原子或一个二甲基氨基;(b) 一个可加成聚合的重复单元,该重复单元衍生自分子中含有一个 CH2 = C 基团的化合物,必要时还包括一个金属氯化物或硝酸盐的水合物。