Polymerizable fluorinated ester, manufacturing method, polymer, photoresist composition and patterning process
申请人:Kinsho Takeshi
公开号:US20060009602A1
公开(公告)日:2006-01-12
Polymerizable fluorinated ester compounds having formula (1) or (2) are novel wherein R
1
is H, methyl or trifluoromethyl, R
2
is a divalent hydrocarbon group, R
3
is H or a monovalent hydrocarbon group, or R
2
and R
3
, taken together, may form a ring, R
4
is H, OH or a monovalent hydrocarbon group, and R
5
is an acid labile group. They are most useful as monomers to produce polymers for the manufacture of radiation-sensitive resist compositions.
具有公式(1)或(2)的可聚合氟化酯化合物是一种新型化合物,其中R1为H、甲基或三氟甲基,R2为二价碳氢基团,R3为H或一价碳氢基团,或R2和R3一起形成环,R4为H、OH或一价碳氢基团,R5为酸敏感基团。它们最有用的是作为单体,用于生产聚合物,以制造辐射敏感的抗蚀剂组合物。