A fluorinated ester monomer is provided having formula (1) wherein R1 is H, CH3 or CF3, R2 and R3 are H or a monovalent hydrocarbon group, or R2 and R3 forms a hydrocarbon ring, R4 is a monovalent hydrocarbon group, and k is 0 or 1. A polymer obtained from the monomer has transparency to radiation with a wavelength of up to 200 nm and appropriate alkaline hydrolysis, is constructed such that any of water repellency, water slip and surface segregation may be adjusted by a choice of its structure, and is useful in forming ArF immersion lithography materials.
提供了一种具有以下式子(1)的
氟化酯单体,其中R1为H,
CH3或
CF3,R2和R3为H或一价烃基,或R2和R3形成烃环,R4为一价烃基,k为0或1。从该单体获得的聚合物对波长高达200nm的辐射具有透明性,并具有适当的碱性
水解作用,其结构可通过选择调整任何的防
水性,
水滑性和表面分离性,并且适用于形成ArF浸没光刻材料。